ROTATABLE HEATABLE PLACEMENT TOOL AND CHIP MOUNTING SYSTEM COMPRISING SUCH A PLACEMENT TOOL

摘要

A positioning device movable in the z-axis direction perpendicular to the substrate is a support element for a die, comprising: a support element comprising a heating element; A receptacle for the support element, comprising: a receptacle rotatably mounted on the positioning device in the z-axis direction, the receptacle including an insulator body made of a heat insulator; Driving means for driving the receptacle, the driving means being capable of rotating the receptacle about the z-axis; And a supply portion for the cooling fluid through which the receptacle for the support element can be cooled.