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Mems micromirror scan reduced dynamic deformation.

机译:Mems微镜扫描减少了动态变形。

摘要

A mirror support for scanning micromirror comprising said MEMS mirror support: a rod the axis of rotation (120) along the axis of rotation (58) MEMS micromirror scanning; a first extension arm (56) parallel to the axis of rotation (58); a second arm extension (56) parallel to the axis of rotation (58); wherein each extension arm has a first end (140), a middle (142) and a second end (144); a first X-shaped bar (130) having a pair of sleepers (132) connected between the first and the second extension arm (56); and a second X-shaped bar (130) having a pair of sleepers (132) connected between the first and the second extension arm (56); It is connected the first bar-shaped X (130) the first end (140) and the midpoint (142) of each of the first and second extension arm (56) and the second bar-shaped X (130) connected the second end (144) and the midpoint (142) of each of the first and second extension arm (56); and the bar axis of rotation (120) to a transverse midpoint (134) of the first bar-shaped X (130) and a transverse midpoint (134) of the second bar-shaped X (130) being connected .
机译:一种用于扫描微镜的镜支架,其包括所述MEMS镜支架:杆,其旋转轴(120)沿MEMS微镜的旋转轴(58)扫描;平行于旋转轴线(58)的第一延伸臂(56);第二臂延伸部(56)平行于旋转轴线(58);其中每个延伸臂具有第一端(140),中间(142)和第二端(144);第一X形杆(130)具有一对连接在第一和第二延伸臂(56)之间的轨枕(132);第二X形杆(130)具有一对连接在第一和第二延伸臂(56)之间的轨枕(132)。第一和第二延伸臂(56)的第一端(140)的第一端(140)和中点(142)与第二端(第二)的第二端(130)的第一端(140)相连。第一和第二延伸臂(56)中的每一个的(144)和中点(142);且杆旋转轴(120)连接至第一杆形X(130)的横向中点(134)和第二杆形X(130)的横向中点(134)。

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