MEMS scanning micromirror with reduced dynamic deformation

摘要

A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.