PROCESS OF FORMATION OF A CERAMIC COATING ON A SUBSTRATE BY ELECTRON-BEAM PHYSICAL VAPOR DEPOSITION

摘要

it is because in a chamber (14), a composite targeta bar (20) is formed of ceramic powders with acomposition is not uniform in longitudinal direction, and are introduced tothe chamber has at least one substrate (10) in which a ceramic coatinghaving a compositional gradient is formed.the upper face of the bar is scanned by a beamin order to cause the electron to the fusion of the material of the face barabove and the formation of a cloud of vapour in the chamber underreduced pressure. we use a bar (20) having a plurality ofsuperimposed layers of different composition, the composition being in theeach layer is uniform throughout the cross section of thethe bar. each layer of the bar comprises zirconia and at leastan oxide selected from the oxides of nickel, cobalt, iron, and yttrium.cerium, hafnium, lanthanum, niobium, tantalum, and scandium.samarium, gadolinium, dysprosium, ytterbium, and aluminum.