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PROCESS FOR THE PRODUCTION OF Cu(In,Ga)Se2/CdS THIN-FILM SOLAR CELLS
PROCESS FOR THE PRODUCTION OF Cu(In,Ga)Se2/CdS THIN-FILM SOLAR CELLS
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机译:Cu(In,Ga)Se2 / CdS薄膜太阳能电池的生产工艺
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摘要
A process for the preparation of a CuInGaSe2 thin film useable as an absorber layer in CulnGaSe2/CdS solar cells, in which said thin film is obtained by sputtering deposition of a Cu-Ga alloy on a CuInSe2 film, deposited on a substrate covered by an Mo film, and subsequent selenization. Before selenization, In2Se3 and Cu are mixed in a vacuum chamber in the absence of Se. The process uses a polycrystalline target for the deposition of In2Se3. This process is suitable for the production - at industrial level - of CdS thin film solar cells in which the absorber layer is constituted by Cu(In1Ga)Se2.
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机译:一种制备CuInGaSe 2 Sub>薄膜的方法,该薄膜可用作CulnGaSe 2 Sub> / CdS太阳能电池的吸收层,其中所述薄膜是通过溅射沉积Cu获得的。在CuInSe 2 Sub>膜上沉积Cu-Ga合金,然后将其沉积在被Mo膜覆盖的基板上,然后进行硒化处理。在硒化之前,在没有硒的情况下在真空室中混合In 2 Sub> Se 3 Sub>和Cu。该工艺使用多晶靶沉积In 2 Sub> Se 3 Sub>。该方法适于工业级生产吸收层由Cu(In1Ga)Se2构成的CdS薄膜太阳能电池。
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