Flexible Cu(In,Ga)Se2 Thin-Film Solar Cells on Polyimide Substrate by Low-Temperature Deposition Process

摘要

The electrical and structural properties of polycrystalline Cu(In,Ga)Se2 films grown on polyimide (PI) substrates below 400℃ via one-stage and three-stage co-evaporation process have been investigated by x-ray diffraction spectra (XRD),scanning electron microscopy (SEM) and Hall effect measurement.As shown by XRD spectra,the stoichiometric CIGS films obtained by one-stage process exhibit the characteristic diffraction peaks of the (In0.68Ga0.32)2Se3 and Cu(In0.7Ga0.3)2Se.It is also found that the film structures indicate more columnar and compact than the three-stage process films from SEM images.The stoichiometric CIGS films obtained by three-stage process exhibit the coexistence of the secondary phase of (In0.68Ga0.32)2Se3,Cu2-xSe and Cu(In0.7Ga0.3)2Se.High net carrier concentration and sheet conductivity are also observed for this kind of film,related to the presence of Cu2-xSe phase.As a result,when the CIGS film growth temperature is below 400℃,the three-stage process is inefficient for solar cells.By using the one-stage co-evaporation process,the flexible CIGS solar cell on a PI substrate with the best conversion efficiency of 6.38% is demonstrated (active area 0.16cm2).