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ATOMIC LAYER DEPOSITION USING ALKALINE EARTH METAL BETA-DIKETIMINATE PRECURSORS
ATOMIC LAYER DEPOSITION USING ALKALINE EARTH METAL BETA-DIKETIMINATE PRECURSORS
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机译:使用碱土金属β-二酮前体的原子层沉积
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摘要
The present invention provides atomic layer deposition systems and methods that include metal compounds with at least one β-diketiminate ligand. Such systems and methods can be useful for depositing metal-containing layers on substrates.
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