ALKALINE EARTH CYCLOPENTADIENYL COMPOUNDS AS PRECURSORS FOR ATOMIC LAYER DEPOSITION

摘要

A summary of Sr and Ba cyclopentadienyl compounds synthesized and studied in deposition of SrS, BaS, SrTiO_3 and BaTiO_3 films by Atomic Layer Deposition (ALD) is presented. Different alkyl substituted (methyl, isopropyl, tert-butyl) cyclopentadienyl and indenyl ligands were synthesized and coordinated to Sr and Ba. Attempts to stabilize the compounds by adding neutral ligands like THF, dien, trien, diglyme, and triglyme were performed. In addition, N and O donor functionalities were added to the Cp ring by using Me_2NHCH_2CH_2C_5Me_4 and EtOCH_2CH_2C_5Me_4 as ligands. The compounds were characterized by elemental analysis, NMR and mass spectrometry, and crystal structures of several compounds were determined. According to thermogravimetric measurements tri ~tPr and ~tBu substituted compounds showed most complete volatility. ALD deposition and characteristics of SrS, BaS, SrTiO_3 and BaTiO_3 films made from different precursors will be presented.