Disclosed are: a method for forming a fine concave-convex pattern on a photocurable resin by a nano imprinting process method using an intermediate stamper, wherein the releasability between the intermediate stamper and the photocurable resin having the fine concave-convex pattern transferred thereon is improved; and a device which can be used for the method.Specifically disclosed is a method for forming a concave-convex pattern, which comprises a step of transferring a fine concave-convex pattern formed on the surface of a mold (34) onto a transfer layer (31) that is formed in a photocurable transfer sheet (30) and is composed of a photocurable composition capable of being deformed by pressurization to form a fine inverted concave-convex pattern on the transfer layer (31) and a step of transferring the resulting inverted concave-convex pattern onto a photocurable resin layer (41) that is formed on a substrate (40) and is composed of a photocurable resin composition to thereby form the same concave-convex pattern as that formed on the mold (34) on the photocurable resin layer (41). The method is characterized in that the transfer layer (31c) having the inverted concave-convex pattern formed thereon is subjected to a UV ozone treatment.
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