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PROCESS FOR PRODUCTION OF OPTICAL VANADIUM DIOXIDE THIN FILM

机译:光学二氧化钒薄膜的生产工艺

摘要

Disclosed is a process for producing a thin film which contains vanadium dioxide as the main component and of which infrared ray transmissibility can be adjusted automatically in accordance with temperatures, in a simple manner even in the atmosphere at room temperature. The process is characterized in that a thin film comprising a precursor containing vanadium atoms is formed on a glass substrate and the thin film is irradiated with light such as a laser beam having a wavelength of 400 nm or less, thereby producing a thin film which contains vanadium dioxide as the main component and of which the infrared ray transmissibility can be adjusted automatically in accordance with temperatures without requiring the control of the gas atmosphere.
机译:本发明公开了一种以二氧化钒为主要成分的薄膜的制造方法,即使在室温下的大气中,也可以根据温度以简单的方式自动调节红外线的透射率。该方法的特征在于,在玻璃基板上形成包含含钒原子的前体的薄膜,并用波长为400nm以下的激光等光照射该薄膜,从而得到含有以二氧化钒为主要成分,并且可以根据温度自动调节红外线的透射率,而无需控制气体气氛。

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