首页> 外国专利> MANUFACTURING METHOD OF FERROELECTRIC PVDF/PMMF THIN FILM WITH ULTRA LOW SURFACE ROUGHNESS AND NONVOLATILE MEMORY DEVICES WITH THE THIN FIM

MANUFACTURING METHOD OF FERROELECTRIC PVDF/PMMF THIN FILM WITH ULTRA LOW SURFACE ROUGHNESS AND NONVOLATILE MEMORY DEVICES WITH THE THIN FIM

机译:超低表面粗糙度和薄型非易失性存储器的铁电PVDF / PMMF薄膜的制造方法

摘要

PURPOSE: A method for manufacturing a poly-vinylidene fluoride(PVDF)/poly methyl methacrylate(PMMA) based thin film and a method for manufacturing a non-volatile memory device using the thin film are provided to obtain a high remanent-polarization property by applying the thin film to several components of a memory device including a capacitor and a field effect transistor. CONSTITUTION: A mixture solution of PMMA and PVDF is spin-coated to form a thin film. The spin-coated thin film is melted at a temperature which is higher than the melting point of the PVDF and the PMMA. The melted thin film is quenched. The quenched thin film is annealed. The annealing temperature is between 100 and 155 degrees Celsius. The ratio of the PMMA is between 10 and 20 weight% with respect to the total weight of the mixture solution.
机译:目的:提供一种用于制造基于聚偏二氟乙烯(PVDF)/聚甲基丙烯酸甲酯(PMMA)的薄膜的方法以及一种使用该薄膜的非易失性存储器件的制造方法,以通过以下方法获得高剩余极化特性。将薄膜施加到包括电容器和场效应晶体管的存储器件的几个部件上。组成:将PMMA和PVDF的混合溶液旋涂以形成薄膜。旋转涂布的薄膜在高于PVDF和PMMA的熔点的温度下熔融。熔化的薄膜被淬火。将淬火的薄膜退火。退火温度在100到155摄氏度之间。相对于混合物溶液的总重量,PMMA的比例为10至20重量%。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号