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Method of manufacturing oxide thin film, method of manufacturing ferroelectric thin film, ferroelectric thin film, ferroelectric memory device, and ferroelectric piezoelectric device
Method of manufacturing oxide thin film, method of manufacturing ferroelectric thin film, ferroelectric thin film, ferroelectric memory device, and ferroelectric piezoelectric device
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机译:氧化物薄膜的制造方法,铁电薄膜的制造方法,铁电薄膜,铁电存储装置以及铁电压电装置
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摘要
A ferroelectric film manufactured by using a supercritical fluid. The supercritical fluid is a fluid which includes a ferroelectric element and is pressurized at a pressure ranging from the critical pressure to four times the critical pressure, for example.
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