SURFACE TREATING AGENT AND A SURFACE TREATING METHOD USING THE SAME, CAPABLE OF EFFECTIVELY PREVENTING THE COLLAPSE OF INORGANIC PATTERNS OR RESIN PATTERNS ON A SUBSTRATE

摘要

PURPOSE: A surface treating agent and a surface treating method using the same are provided to strongly implement a silylation treatment with respect to the surface of a substrate.;CONSTITUTION: A surface treating agent used for a surface treatment process with respect to a substrate. The surface treating agent includes silylation agent and a silylation heterocyclic compound. The silylation heterocyclic compound is nitrogen-contained silylation heterocyclic compound. The silylation heterocyclic compound is represented by general formula 1. The silylation agent is represented by general formula 2.;COPYRIGHT KIPO 2011