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A method for making a substrate water repellent, a surface treatment agent, and a method for suppressing the collapse of an organic pattern or an inorganic pattern when cleaning the substrate surface with a cleaning liquid.
A method for making a substrate water repellent, a surface treatment agent, and a method for suppressing the collapse of an organic pattern or an inorganic pattern when cleaning the substrate surface with a cleaning liquid.
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机译:用清洁液清洁基板表面时,制备基板防水剂,表面处理剂和用于抑制有机图案的塌陷或无机图案的方法。
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摘要
A method for imparting water repellency to a substrate; a surface treatment agent used in the method; and a method for suppressing collapse of an organic or inorganic pattern in cleaning the substrate surface with a cleaning liquid. The method includes exposing a surface of a substrate to a surface treatment agent, the surface treatment agent including a water-repelling agent and a nitrogen-containing heterocyclic compound, the water-repelling agent including an alkoxymonosilane compound having a hydrophobic group bonded to a silicon atom. A surface treatment agent including a water-repelling agent and a nitrogen-containing heterocyclic compound, the water-repelling agent (A) including an alkoxymonosilane compound having a hydrophobic group bonded to a silicon atom.
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