METHOD FOR WATER-REPELLENT TREATMENT OF SUBSTRATE, SURFACE TREATMENT AGENT, AND METHOD FOR SUPPRESSING COLLAPSE OF ORGANIC PATTERN OR INORGANIC PATTERN WHEN CLEANING SUBSTRATE SURFACE WITH CLEANING SOLUTION

摘要

The present invention provides a method for water-repellent treatment of a substrate, capable of providing a substrate with excellent water repellency, a surface treatment agent used for the method, and a method for suppressing collapse of an organic or an inorganic pattern when cleaning a substrate surface with a cleaning solution. The method for water-repellent treatment of a substrate includes exposing a surface treatment agent to a surface of a substrate, and the surface treatment agent comprises: (A) a water-repelling agent; and (B) a nitrogen-containing heterocyclic compound, wherein (A) the water-repelling agent includes an alkoxy monosilane compound having a hydrophobic group bonded to a silicon atom.;COPYRIGHT KIPO 2019