APPARATUS AND A METHOD FOR MANUFACTURING METAL-FREE CARBON NANO-TUBES, CAPABLE OF FORMING A TRANSPARENT ELECTRODE WITHOUT IMPURITIES

摘要

PURPOSE: An apparatus and a method for manufacturing metal-free carbon nano-tubes are provided to directly grow large-sized carbon nano-tubes exclusively composed of carbon using carbon as a catalyst without a metal catalyst.;CONSTITUTION: An apparatus for manufacturing metal-free carbon nano-tubes includes a catalyst layer forming unit and a microwave plasma enhanced chemical vapor deposition unit. The catalyst layer forming unit includes a support, a rotary motor, a plurality of targets, and a catalyst forming part. The support supports a substrate(100) in a vacuum chamber. The rotary motor rotates the support. The targets deposit amorphous carbon film as a catalyst layer on the substrate. The catalyst forming part uses a radio frequency magnetron sputtering method.;COPYRIGHT KIPO 2011