CHARGED-PARTICLE BEAM WRITING METHOD AND A CHARGED-PARTICLE BEAM WRITING APPARATUS, CAPABLE OF REDUCING THE NUMBER OF STAGE MOVEMENT BETWEEN STRIPES

摘要

PURPOSE: A charged-particle beam writing method and a charged-particle beam writing apparatus are provided to shorten the writing time for writing a plurality of writing groups by shortening the movement time of XY stage mounting the sample.;CONSTITUTION: A memory device(144) stores the layout information of a plurality of patterned chips. A writing group setting part(108) comprising one or more chip sets a plurality of writing groups. A frame setting part(112) sets the frame which surrounds all the chip area within the writing group. An area divider(114) virtually partitions the frame into a plurality of areas.;COPYRIGHT KIPO 2011