Versatile proton beam writing system with stage movement

摘要

We propose a Proton beam writing (PBW) system with an auto scanning program and stage movement in order to entirely solve the narrow scanning and low design problems of PBW technique. We developed the auto scanning program to transform from 3D CAD (Computer Aided Design) data to scanning pattern data which enables to pattern the complex structures more accurate and much faster. On the other hand, we combined the XY-stage control and electrostatic scanning to expand the fabrication area of our previous system from micrometers range to centimeters range which able to fabricate the whole microstructures network by one exposing time. Our PBW system provides a versatile tool with the unique advantages of proton beam for 3D machining, particularly useful for high-aspect ratio and complicated microstructures.