METHOD FOR FORMING A SEMICONDUCTOR CELL ARRAY AREA, METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING THE SAME AND METHOD FOR FORMING A SEMICONDUCTOR MODULE INCLUDING THE SEMICONDUCTOR DEVICE CAPABLE OF IMPROVING AN ELECTRIC PROPERTY

摘要

PURPOSE: A method for forming a semiconductor cell array area, a method for manufacturing a semiconductor device including the same, and a method for forming a semiconductor module including the semiconductor device are provided to stably secure an active area from a semiconductor plate by minimizing the influence of a semiconductor manufacturing process on an interface. ;CONSTITUTION: A semiconductor layer(20) is patterned to a plurality of particles. The plurality of particles are insulated on a semiconductor plate(10). Semiconductor pillars are formed on the semiconductor plate. The semiconductor plate has the materials which are different from the semiconductor layer. The semiconductor plate does not have oxygen elements.;COPYRIGHT KIPO 2011