FORCE OR PRESSURE SENSOR ARRAY, METHOD OF MANUFACTURING THE ARRAY AND METHOD OF MEASURING FORCE OR PRESSURE USING THE ARRAY CAPABLE OF PROVIDING A SIMPLE AND STRONG SENSOR STRUCTURE

摘要

PURPOSE: A force or pressure sensor array, a method of manufacturing the array and a method of measuring force or pressure using the array are provided to ensure a simple and strong sensor structure and enhance the sensitivity of a signal, a repetition rate and reproducibility.;CONSTITUTION: A force or pressure sensor array using a semiconductor strain gauge comprises a circuit substrate(10) and a pair of elastomers(20). The circuit substrate consists of a semiconductor strain gauge, a pair of polymer film layers and a pair of signal line layers. The semiconductor strain gauge is formed in a given pattern of array and is deformed by force or pressure. The polymer film layer makes contact with film surfaces and the semiconductor strain gauge is arranged between the film surfaces. One of the polymer film layers is an insulating layer and the signal line layer is formed on the top and bottom of the insulating layer.;COPYRIGHT KIPO 2012