FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY USING SEMICONDUCTOR STRAIN GAUGE, MANUFACTURING METHOD OF FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY, AND FORCE OR PRESSURE MEASUREMENT METHOD USING FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a force or pressure sensor array using a semiconductor strain gauge that simultaneously possesses flexibility, elasticity, and rigidness.SOLUTION: A force or pressure sensor array includes a semiconductor strain gauge that is formed of a predetermined array pattern and deformed by a force or pressure, a pair of polymer film layers including the semiconductor strain gauge between the contacted film surfaces which are oppositely in contact with each other, an electrode which is formed so that either of the pair of polymer film layers is used as an insulating layer, formed on top and bottom surfaces of the insulating layer, and connected to each unit member 111 of the array pattern, a substrate 10 composed of a pair of signal line layers that externally captures a deformation signal outputted by the deformation of each unit member 111; and a pair of elastomer layers 20, 30 formed on both surfaces of the substrate 10 so as to include the substrate 10 therein.