FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY USING SEMI-CONDUCTOR STRAIN GAUGE WHICH IS ADAPTING CMOS CIRCUIT, FABRICATION METHOD THEREOF AND MEASUREMENT METHOD THEROF

摘要

The present invention relates to a force or pressure sensor array of a semiconductor strain gauge using CMOS (Complementary metal-oxide-semiconductor) circuit signal processing method. More specifically, a plurality of polymer films in which a plurality of units are formed in a predetermined array pattern to have a semiconductor strain gauge deformed by a force or pressure, and a semiconductor strain gauge is provided between the film surfaces in contact with and in contact with each other. Formed on the upper and lower surfaces of the insulating layer using any one of a layer and a pair of polymer film layer to form a CMOS circuit, connected to each of the units to form an electrode, and outputs a deformation signal output by the deformation of each unit And a switch controller configured to control the plurality of switches and switches connected to the ends of each of the second signal lines and sequentially scan each of the second signal lines so that current flows in any one of the second signal lines. A circuit board; And a pair of elastomer layers formed on both sides of the circuit board so that the circuit board is included therein. The present invention relates to a force or pressure sensor array of a semiconductor strain gauge to which a CMOS circuit signal processing method is applied.