RAPIDITY TEMPERATURE CONTROL DEVICE OF TEST HANDLER CHAMBER

摘要

PURPOSE: A test handler chamber rapid temperature control device is provided to uniformly disperse the air heated by a heating device inside the test chamber. CONSTITUTION: A heating apparatus(20) heats the inside of a testing chamber(10) accepting a test tray for testing the semiconductor device in the test condition of high temperature. A cooling device(30) cools the inside of the testing chamber in the test condition of low temperature. A ventilation device(40) forcibly circulates the air inside the testing chamber via the heating apparatus and the cooling device.