Portable Four-Point Probe for Sheet Resistance Measurement with the Dual Configuration Method

摘要

A portable four point probe for measuring sheet resistance using dual configuration method is provided to perform accurate measurement regardless of size, shape, and measurement position of a sample. A portable four point probe is contacted on a surface of a sample. After a current is supplied to outside two pins, a voltage is measured by inside two pins. A first resistance is calculated. After a current is supplied to a first pin and a third pin of the portable four point probe, a voltage is measured in a second pin and a fourth pin. A second resistance is calculated. A sheet resistance is calculated by the first resistance and the second resistance.