Certification of 100 mm Diameter Silicon Resistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe Measurements, 2006 Edition

摘要

This report documents the selection of material, the certification procedure and its control, and the analysis of measurement uncertainty for a family of improved Standard Reference Materials (SRMs) for sheet resistance and resistivity of silicon wafers, SRMs 2541 through 2547, covering the resistivity range 0.01 S.cm through 200 S.cm. These SRMs, made from 100 mm diameter silicon, replace previous SRM sets 1521 through 1523, which used 50.8 mm (2 in) diameter silicon at the same nominal resistivity levels. This revised report replaces both the original 1997 report and a 1999 update. It contains three new appendices: 10, 11, and 12 which summarize H.-K. Lius statistical reports of analysis of second batch certifications for SRMs 2541, 2543 and 2544 as well as an appendix 13 that details the SRM serial numbers that were part of those second batch certifications. This revision also includes updates to tables 10 through 15 to include summaries of the uncertainty component results from those secondbatch certifications.