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Method for controlling oxygen radial gradient of single crystal

机译:控制单晶氧径向梯度的方​​法

摘要

the present invention increases the low oxygen melt jangipryang hot zone of the oxygen concentration gradient in the single crystal and method for controlling the initiation . Oxygen concentration gradient control method of a single crystal according to the present invention is a method of growing a single crystal through a solid-liquid interface by raising the seed while rotating the quartz crucible and the seed in an opposite direction to the upper portion after dipping the seed in a semiconductor melt received in a quartz crucible, the method, the quartz crucible in which the melt of jangipryang receiving the melt and the quartz crucible is increased by the increase in contact area in a state, the magnetic field of the vertical component of zero ZGP (Zero Gauss Plane) is a solid-liquid interface based on a 0 to - applying a magnetic field larger soup arranged between 50mm to melt, and the seed rotation rate and crucible rotation speed is higher than the melt jangipryang the control seed and crucible rotation speed prior to increasing the rotational speed, and a melt flow rate of the inert gas gap and the melt jangipryang lower than the flow rate of the control prior to the increase in a melt gap and an inert gas, the chamber pressure is controlled by the melt jangipryang above the chamber prior to increasing the pressure, characterized by controlling the oxygen concentration gradient of the single crystal.
机译:本发明增加了单晶中氧浓度梯度的低氧熔体热生成区和控制引发的方法。根据本发明的单晶的氧浓度梯度控制方法是通过在浸渍后使石英坩埚和晶种沿与上部相反的方向旋转的同时升高晶种来通过固-液界面生长单晶的方法。石英坩埚中所容纳的半导体熔体中的晶种,方法,在垂直分量的磁场的状态下,通过接触面积的增加,使接收到该熔体的金吉普良与石英坩埚的熔体增加的石英坩埚零ZGP(零高斯平面)是基于0的固-液界面-施加布置在50mm之间的更大的磁场使之熔化,并且种子的旋转速率和坩埚旋转速度都高于对照种子的熔化jangipryang坩埚转速,然后再提高转速,并且惰性气体间隙的熔体流动速率和熔体的流速低于钴的流速在增加熔体间隙和惰性气体之前,控制反应室的压力,在增加压力之前,通过提高反应室上方的熔体的温度来控制反应室的压力,其特征在于控制单晶的氧浓度梯度。

著录项

  • 公开/公告号KR101028297B1

    专利类型

  • 公开/公告日2011-04-11

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20090062561

  • 发明设计人 홍영호;강광렬;김상희;

    申请日2009-07-09

  • 分类号C30B15/20;

  • 国家 KR

  • 入库时间 2022-08-21 17:50:22

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