METHOD FOR CONTROLLING THE OXYGEN RADIAL GRADIENT OF A SINGLE CRYSTAL, OBTAIN SUPERIOR OXYGEN RADIAL GRADIENT WITHOUT THE STRUCTURAL CHANGE OF A LOW OXYGEN HOT-ZONE

摘要

PURPOSE: A method for controlling the oxygen radial gradient of a single crystal is provided to uniform the concentration of oxygen flowing into the single crystal in a radial direction by optimizing operational parameters.;CONSTITUTION: The charge of melt contained in a quartz crucible is increased in order to increase the contact area of the melt and the quartz crucible. A cusp magnetic field is applied to the melt, and Zero-gauss plane is between 0 and -50mm. The rotary speeds of seed and the crucible, a melt gap, the flow rate of inert gas, and pressure in a chamber are controlled based on the increase of the charge of the melt.;COPYRIGHT KIPO 2011