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Method for removing solar cell surface damage due to plasma dry etching and manufacturing method of solar cell using same
Method for removing solar cell surface damage due to plasma dry etching and manufacturing method of solar cell using same
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机译:去除由于等离子体干法蚀刻而引起的太阳能电池表面损伤的方法以及使用该方法的太阳能电池的制造方法
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摘要
PURPOSE: A solar cell surface damage removing method and a solar cell manufacturing method using the same are provided to improve the process efficiency remarkably by preventing the surface damage of the solar cell with simple method of dipping a solar cell substrate in the nitride solution. CONSTITUTION: An emitter layer(110) is formed by injecting the impurity material of second conductive type into a substrate(100). A front side reflection barrier layer(120) is formed on the emitter layer in order to lower the reflectivity of sunlight. A front electrode is formed to pass through the front side reflection barrier layer and contact the emitter layer.
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