SEMICONDUCTOR DEVICE WITH SIDEWALL JUNCTION CAPABLE OF PREVENTING A FLOATING BODY BY FORMING A DIFFUSION BARRIER AREA AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A semiconductor device with sidewall junction and a manufacturing method thereof are provided to prevent a floating body by controlling the excessive diffusion of following sidewall junction by forming a diffusion barrier area on an area in which sidewall junction is formed.;CONSTITUTION: A plurality of bodies(201) is separated by a trench and includes a diffusion barrier area(23A) in which both sidewalls are exposed. A doped film, which gap-fills the trench, is formed. The doped film is annealed and sidewall junction(38) is formed in the diffusion barrier area. A conductive line, which is connected to the sidewall junction and partially fills the trench, is formed.;COPYRIGHT KIPO 2012