THERMAL PHOTODETECTOR, THERMAL PHOTODETECTION DEVICE, ELECTRONIC EQUIPMENT, AND METHOD OF MANUFACTURING THERMAL PHOTODETECTOR

摘要

PROBLEM TO BE SOLVED: To improve detection sensitivity of a thermal photodetector.;SOLUTION: A thermal photodetector includes: a substrate 10; a support component 215 which is supported via a hollow portion 102 to face the substrate; a thermal detection element 230 which is formed on the support component and has structure including a lower electrode 234 and an upper electrode 236 sandwiching a pyroelectric material layer 232 in between; light absorption layers (270, 272) which are formed on the thermal detection element; and a heat transfer component 260 which includes a heat collection portion FL being connected to the thermal detection element 230 via a connection portion CN, having an area larger than the connection portion in planar view, having optical transparency for at least a portion of wavelength region of light, and being formed inside the light absorption layers (270, 272). The lower electrode 234 has an extended portion RX which extends around the pyroelectric material layer 232 in planer view. The extended portion RX has a light reflection property of reflecting at least a portion of light transmitted through the heat collection portion FL of the heat transfer component 260.;COPYRIGHT: (C)2012,JPO&INPIT