THERMAL PHOTODETECTOR, THERMAL PHOTODETECTION DEVICE, ELECTRONIC INSTRUMENT AND METHOD FOR MANUFACTURING THERMAL PHOTODETECTOR

摘要

PROBLEM TO BE SOLVED: To improve the detection sensitivity of a thermal photodetector.;SOLUTION: A thermal photodetector comprises: a substrate 10; a support member 215 supported via a cavity 102 by the substrate; a heat detection element 230 supported by the support member; a heat transfer member 260 that is connected to the heat detection element by a connection part CN and has a heat-collecting part FL having an area larger than that of the connection part in a plan view and formed on the heat detection element 230; a first light absorption layer 270 that is formed between the heat transfer member 260 and the heat detection element 230 and contacting the heat transfer member 260; and a second light absorption layer 272 that is formed on the heat transfer member 260 and contacting the heat transfer member 260.;COPYRIGHT: (C)2012,JPO&INPIT