METHOD FOR MANUFACTURING SOLID ELECTROLYTE THIN FILM, AND SOLID ELECTROLYTE THIN FILM

摘要

PROBLEM TO BE SOLVED: To find thin film formation conditions of LiSiO-LiPOwhich is promising as an inorganic solid electrolyte of a lithium ion secondary battery and to provide a solid electrolyte thin film consisting of the LiSiO-LiPO.SOLUTION: The method for manufacturing the solid electrolyte thin film includes: a preparation process of arranging a substrate A inside a chamber 10 with a nozzle 12; a decompression process of decompressing the chamber 10; a spray process of spraying aerosol containing the LiSiO-LiPOfrom the nozzle 12 to the surface of the substrate A; and a film formation process of relatively moving the substrate A against the nozzle 12 to form a thin film of the LiSiO-LiPOon the entire surface of the substrate A.