Quartz heater and a substrate processing apparatus using this method for detecting damage to the quartz heater and the substrate processing control method using the same

摘要

PROBLEM TO BE SOLVED: To provide a quartz heater and a substrate treatment device using the same capable of quickly detecting even a little volume of liquid leak in a comparatively simple structure, as well as a breakage detecting method of the quartz heater and a substrate treatment control method using the same.;SOLUTION: The quartz heater 10, 10a, 10b heating liquid 40 by mounting a quartz tube 11 incorporating a heating element 20 in the liquid 40 is provided with a cooling tube 12 coupled with the quartz tube 11 and incorporating an electric wire 21 to supply power to the heating element 20, and a liquid leak sensor 30 in the cooling tube 12.;COPYRIGHT: (C)2009,JPO&INPIT