Is formed on the other circuit components on the integrated circuit chip microfabricated transducer and manufacturing method thereof

摘要

(57) Abstract This invention here array of acoustic transducer to be included, as for array of acoustic transducer be able to offer the array and the production method of acoustic transducer or this kind of transducer which is formed on one integrated circuit tip/chip, be able to detect the respective sound signaling and be able to generate the transducer signal, the 1st and 2nd electrode where the void territory is arranged between and, one which the 1st and 2nd electrode is related on the one hand signal line is included at least. Under array of acoustic transducer the plural amplifiers and the other circuit components are arranged, therefore the respective plural amplifiers are connected by one of the signal lines which it is related to one of acoustic transducer, in order to obtain the transducer signal which is expanded on the output signal line of the amplifier the transducer signal which it is related can be expanded.