Magnetic excitation plasma chamber having a non-uniform magnetic field

摘要

PROBLEM TO BE SOLVED: To create an instantaneous distribution of uniform ion flux on a surface of a workpiece.;SOLUTION: Specifically, magnetic excitation is carried out by a magnet generating a new magnetic field pattern. Within a region parallel to and adjacent to the workpiece, the magnitude and direction of an instantaneous magnetic field are related to each other, such that the direction of the magnetic field at that location is the vector product of (1) the gradient of the magnitude of the magnetic field at the location, and (2) a vector that extends perpendicularly, from the workpiece surface toward plasma. The magnetic excitation is carried out by the magnet generating the new magnetic field pattern. Within a region parallel to and adjacent to the workpiece, the magnitude and direction of an instantaneous magnetic field are related to each other, such that the direction of the magnetic field at that location becomes the vector product of (1) the gradient of the magnitude of the magnetic field at the location, and (2) a vector that extends perpendicularly from the workpiece surface toward the plasma.;COPYRIGHT: (C)2009,JPO&INPIT