Containing spelter compound and the said spelter compound, the raw materials for thin film formation and the production manner of the thin film which become

摘要

P To impart suitable properties such as volatility and melting point-lowering property to a bisalkoxy zinc compound having sufficient reactivity as a precursor for supplying zinc to thin films to provide a zinc compound especially suitable as a raw material for CVD. PSOLUTION: The zinc compound is represented by general formula (1) (wherein, one of RSP1/SPand RSP2/SPis ethyl or isopropyl, and the other is H, methyl and ethyl or isopropyl; RSP3/SPis a 1 to 4C alkyl). PCOPYRIGHT: (C)2008 and JPO& INPIT