Hot spot refine equipment, hot spot narrow way, hot-spot refinement program, hot-spot inspection equipment, and, hot spot inspection method

摘要

PPROBLEM TO BE SOLVED: To extract a hot spot that easily causes a defect from a great number of hot spots. PSOLUTION: An information storage section 10 stores hot spot information 12, surface profile information 13 and CAD information 11 as input information about a semiconductor device being an inspection object. An information processing section 20 acquires data such as surface profile data and a functional block name at each position of hot spots stored in the hot spot information 12 as surface attribute information by referring the surface profile information 13 and the CAD information 11, and creates information-added hot spot information 14 (additional information creating section 23). The information processing section creates narrowing down condition information 15 (narrowing down condition setting section 24) based on the information input from an input section 50 and extracts a hot spot which matches the set narrowing down condition by referring the information-added hot spot information 14 and creates narrowed down hot spot information 16 (hot spot narrowing down section 25). PCOPYRIGHT: (C)2009,JPO&INPIT