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SURFACE ACOUSTIC WAVE ELEMENT, SURFACE ACOUSTIC WAVE SENSOR, SENSING SYSTEM, AND STRESS MEASUREMENT METHOD

机译:表面声波元件,表面声波传感器,传感系统和应力测量方法

摘要

PROBLEM TO BE SOLVED: To provide a surface acoustic wave element, a surface acoustic wave sensor, a sensing system, and a stress measurement method, in which when detecting a state of a measurement target based on a reflection power change, the measurement sensitivity of the detection can be increased.;SOLUTION: A reflector 9 has characteristics that a reflection coefficient is changed in accordance with stress applied to the reflector 9 itself, and the center frequencies of interdigital electrodes 5, 9 for generating surface acoustic waves are set to a predetermined frequency area including an attenuation pole in a frequency characteristic of the reflection coefficient of the reflector 9 and the vicinity of the attenuation pole. Thereby when stress is applied to the reflector 9, the reflection coefficient of the reflector 9 is sharply changed, so that energy of a reflected wave reflected by the reflector 9 is also sharply changed. When the reflected wave is converted into a response signal by the interdigital electrodes 5, 7, power of the response signal is also sharply changed. Thus, a stress change can be easily detected by detecting a change in the response signal by a transmitter-receiver 37.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:提供一种声表面波元件,声表面波传感器,感测系统和应力测量方法,其中,当基于反射功率变化来检测测量对象的状态时,其灵敏度为解决方案:反射器9具有以下特性:反射系数根据施加到反射器9本身的应力而变化,并且用于产生表面声波的叉指式电极5、9的中心频率被设置为α。预定频率区域包括反射器9的反射系数的频率特性中的衰减极点和衰减极点附近。从而,当应力施加到反射器9上时,反射器9的反射系数急剧变化,使得由反射器9反射的反射波的能量也急剧变化。当通过叉指电极5、7将反射波转换成响应信号时,响应信号的功率也急剧变化。因此,通过用收发器37检测响应信号的变化,可以容易地检测到应力变化。版权所有:(C)2012,JPO&INPIT

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