Implementation of ZnO nanorods as sensing elements for a surface acoustic wave sensor

摘要

The limited sensitivity of thinfilm based sensors has motivated the search for sensing structures and materials with greater sensing performance. Although thinfilm based SAW devices have been used as force, pressure, chemical and gas sensors so far. It is limited by the exposed sensing surface of the thinfilm. A feasibility study has been done by implementing the ZnO nanorods (NRs) to enhance the device sensitivity by greatly increase the exposed sensing surface. The implementation of these ZnO NRs as sensing elements is expected to enhance the sensing power due to the large surface to volume ratio. The sensing mechanism in this design is by detecting the minute change of seismic mass for ZnO NRs using surface acoustic wave before and after the attachment of reacting chemical liquid and gas substance.