SURFACE ACOUSTIC WAVE ELEMENT, ITS MANUFACTURING METHOD, SURFACE ACOUSTIC WAVE SENSOR AND SURFACE ACOUSTIC WAVE SENSOR SYSTEM

摘要

PROBLEM TO BE SOLVED: To use a structure of a diamond SAW element, which keeps a diamond layer, a piezoelectric body layer and a reed screen transducer (IDT) overlying the surface of a substrate, in the transducer of an SAW sensor as it is to enhance the frequency thereof.;SOLUTION: The SAW element 1 is formed by making the diamond layer 3, the piezoelectric body layer 4 of ZnO and an insulating protective film 12 of input and output IDTs 6 and 8, which comprise cross digital electrodes, and SiO₂ overlie the surface of an Si substrate 2. The piezoelectric body layer and insulating protective film between both IDTs are partially removed to form a response part 11 wherein the surface of the diamond layer is exposed. A receptor for recognizing a physiological or chemical substance being a measuring target is fixed to the surface of the response part to obtain the SAW sensor.;COPYRIGHT: (C)2007,JPO&INPIT