Production method and baseplate transfer method of baseplate processing method and baseplate processor and semiconductor device

摘要

To obtain a method for processing a substrate using a plurality of boats in which the processing quality is stabilized and enhanced by eliminating the difference of processing quality based ON the individual difference of the boats. SOLUTION: The method for processing a substrate comprises a reaction furnace 11, a plurality of boats 21a and 21b and a means for identifying the boat wherein a substrate is processed by specifying a boat depending ON the content of processing.