Being baseplate processing method and the baseplate processing method of processing the production methodological baseplate

摘要

PROBLEM TO BE SOLVED: To improve accuracy of processing of a substrate.;SOLUTION: A substrate processing method, which subjects the substrate to a predetermined processing, includes: a step of acquiring identification information that contains either information on an identification of a substrate or information on an identification of predetermined processing; and a step of setting a processing parameter used for the predetermined processing based on the identification information.;COPYRIGHT: (C)2011,JPO&INPIT