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Basic compound, sense radiation acid diffusion control agent and positive type radiation radiation resin composition
Basic compound, sense radiation acid diffusion control agent and positive type radiation radiation resin composition
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机译:碱性化合物,感性放射线酸扩散控制剂和正型放射线树脂组合物
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摘要
PROBLEM TO BE SOLVED: To provide a basic compound suitable as an acid diffusion controller in a positive-type radiation-sensitive resin composition useful for fine processing in which every kind of radiation, such as far ultraviolet rays, an electron beam, and X rays, is used.;SOLUTION: This basic compound comprises an onium salt expressed by general formula (1) (at least one of Z1 and Z2 is F or a 1-10C straight-chain or branched-chain perfluoroalkyl; R1s may be identical to or different from each other and are each an alkyl or a cycloalkyl, or two of R1s and N bonded thereto together form a ring; A is a bivalent organic group or a single bond; and M+ is a sulfonium cation, an iodonium cation or the like).;COPYRIGHT: (C)2007,JPO&INPIT
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机译:解决的问题:在碱性型放射线敏感性树脂组合物中提供适合作为酸扩散控制剂的碱性化合物,可用于精细加工,在该加工中,各种射线,例如远紫外线,电子束和X射线SOLUTION:该碱性化合物包含通式(1)表示的鎓盐(Z 1 Sup>和Z 2 Sup>中的至少一个是F或1 -10C直链或支链全氟烷基; R 1 Sup>可以彼此相同或不同,分别为烷基或环烷基,或R 1 Sup中的两个> s和N结合在一起形成一个环; A是二价有机基团或单键; M + Sup>是sulf阳离子,碘鎓阳离子等)。版权所有:(C )2007,日本特许厅
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