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Being the device which measures the property of manner and the device null structure which measure the property of structure

机译:是衡量方式性质的设备和衡量结构性质的设备无效结构

摘要

Is related to an apparatus for measuring characteristics of the structure, the apparatus is adapted to output at a different wavelength of radiation, the present invention, a radiation generating means 1 for generating a second radiation probe and the first pump radiation When, the six detector means for detecting the second beam that passed through or reflected from the structure, generating a signal to be analyzed, generate a time offset between the second probe radiation and a first pump on the structure means 3 for, check the zone that processes a signal corresponding to the jump, it is determined as a function of different wavelengths and amplitudes of the jump, is compared with the amplitude change theoretical pattern of change in amplitude of the amplitude according to wavelength, the theoretical The comparison with the wavelength characteristic of the specific pattern, and a, and means 7 for determining a characteristic value relating to the radiation propagation speed in the structure and thickness of the structure.
机译:与一种用于测量结构特征的设备有关,该设备适于输出不同波长的辐射,本发明的辐射发生装置1用于产生第二辐射探针和第一泵浦辐射时,六个探测器用于检测穿过该结构或从该结构反射的第二光束,生成要分析的信号,在第二探针辐射与结构上的第一泵浦之间产生时间偏移的装置3,用于检查处理信号的区域对于跳跃,确定为不同波长和跳跃幅度的函数,将其与幅度变化的理论模式进行比较,根据波长变化幅度的幅度,将理论上与特定模式的波长特征进行比较,和,以及用于确定与s中的辐射传播速度有关的特征值的装置7结构的结构和厚度。

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