Heating calculation mannered null silicon crystal of nitrogen density measurement manner and proportional

摘要

PROBLEM TO BE SOLVED: To measure the nitrogen concentration in a silicon crystal precisely by a simple differential infrared absorption spectrum without needing respective references regarding nitrogen concentration measurement method and calculation method of proportional conversion coefficient for nitrogen concentration measurement.;SOLUTION: A silicon crystal is heated to 600°C for making it into heat equilibrium, after that the first infrared absorption spectrum is measured. Next, the silicon crystal is heated higher than 600°C for making it into quasi-heat equilibrium, after that the second infrared absorption spectrum of the silicon crystal is measured. Next, the differential infrared absorption spectrum is obtained from the first infrared absorption spectrum and the second infrared absorption spectrum, the intensity of absorption peak corresponding to defect caused by nitrogen, based on the intensity of the absorption peak, the nitrogen concentration in the silicon crystal is obtained.;COPYRIGHT: (C)2010,JPO&INPIT