The playback methodological null reaction chamber of the catalyst line in the catalyst line chemical vapor phase growth device and the catalyst line chemical

摘要

PROBLEM TO BE SOLVED: To provide a catalyst line chemical vapor phase growing apparatus and a regenerating method of a catalyst line capable of prolonging the life of the catalyst line and of enhancing productivity.;SOLUTION: Reproducing gas 18c is introduced into a reaction chamber 11 in which the catalyst line 17 is disposed, via gas introduction piping 16, the gas containing a halogenide (e.g., WF₆) of the same component elements (e.g., tungsten) as those of the catalyst line 17. The introduced regeneration gas 18c is brought into contact with the catalyst line 17 to decompose the halogenide with heat of the catalyst line 17, and tungsten elements so decomposed are combined with the catalyst line 17. Consequently, a line size of the catalyst line 17 is recovered for its long life. Further, the catalyst line 17 could be regenerated that is worn owing to contact with cleaning gas 18b.;COPYRIGHT: (C)2007,JPO&INPIT