Catalyst body support structure of catalyst chemical vapor phase growth device

摘要

P To provide a support structure of catalyst body in a catalytic chemical vapor-deposition apparatus achieving the long-term repetitive use of the catalyst body by preventing film adhesion ON a holding member for holding the catalyst body. PSOLUTION: A adhesion-preventive unit 1 is divided into an upper member 1a and a lower member 1b in the direction substantially orthogonal to the axis of a catalyst body 4 with a part in a vicinity of the axis of the catalyst body 4 being a border. Consequently and a holding member 20 and the adhesion-preventive unit 1 are detachably suitable for a column support 130 of a catalytic chemical vapor-deposition apparatus in a non-contact manner with the catalyst body 4. PCOPYRIGHT: (C)2010 and JPO& INPIT