METHODS OF FABRICATING FIELD EFFECT TRANSISTORS INCLUDING TITANIUM NITRIDE GATES OVER PARTIALLY NITRIDED OXIDE AND DEVICES SO FABRICATED

摘要

A gate of an integrated circuit field effect transistor is fabricated by fabricating a gate insulating layer on an integrated circuit substrate, fabricating a metal nitride layer on the gate insulating layer, annealing the metal nitride layer in a nitridizing ambient and fabricating a cap on the metal nitride layer that has been annealed. Thereafter, the cap on the metal nitride layer may be etched to expose sidewalls thereof and another anneal in a nitridizing ambient may take place. Related integrated circuit field effect transistors are also described.