首页> 外国专利> Semiconductor device having first and second source and drain electrodes sandwiched between an island-shaped semiconductor film

Semiconductor device having first and second source and drain electrodes sandwiched between an island-shaped semiconductor film

机译:具有夹在岛状半导体膜之间的第一和第二源极和漏极的半导体器件

摘要

An object is to obtain a semiconductor device with improved characteristics by reducing contact resistance of a semiconductor film with electrodes or wirings, and improving coverage of the semiconductor film and the electrodes or wirings. The present invention relates to a semiconductor device including a gate electrode over a substrate, a gate insulating film over the gate electrode, a first source or drain electrode over the gate insulating film, an island-shaped semiconductor film over the first source or drain electrode, and a second source or drain electrode over the island-shaped semiconductor film and the first source or drain electrode. Further, the second source or drain electrode is in contact with the first source or drain electrode, and the island-shaped semiconductor film is sandwiched between the first source or drain electrode and the second source or drain electrode. Moreover, the present invention relates to a manufacturing method of the semiconductor device.
机译:一个目的是通过减小半导体膜与电极或布线的接触电阻并改善半导体膜与电极或布线的覆盖范围来获得具有改善的特性的半导体器件。半导体器件技术领域本发明涉及一种半导体器件,其包括:在衬底上方的栅电极,在栅电极上方的栅绝缘膜,在栅绝缘膜上方的第一源极或漏极,在第一源极或漏极上方的岛状半导体膜。以及在岛状半导体膜和第一源极或漏极上方的第二源极或漏极。此外,第二源极或漏极与第一源极或漏极接触,并且岛状半导体膜被夹在第一源极或漏极与第二源极或漏极之间。此外,本发明涉及半导体器件的制造方法。

著录项

  • 公开/公告号US8222098B2

    专利类型

  • 公开/公告日2012-07-17

    原文格式PDF

  • 申请/专利权人 TATSUYA HONDA;

    申请/专利号US20100824899

  • 发明设计人 TATSUYA HONDA;

    申请日2010-06-28

  • 分类号H01L21;H01L21/84;

  • 国家 US

  • 入库时间 2022-08-21 17:30:33

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