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Chemical vapour deposition (CVD) process for growing mono-crystalline gem grade diamonds

机译:生长单晶宝石级钻石的化学气相沉积(CVD)工艺

摘要

A method of forming mono-crystalline gem grade diamond by chemical vapour deposition is disclosed, wherein the method comprises the steps of:(a) providing at least one diamond seed;(b) exposing the seed to conditions for growing diamond by chemical vapour deposition, including supplying reaction gases that include a carbon-containing gas for growing diamond and include a nitrogen-containing gas; and(c) controlling the quantity of nitrogen-containing gas relative to other gases in the reaction gases such that diamond is caused to grow by step-growth without defects and graphitic inclusions;wherein the chemical vapour deposition comprises maintaining the seed at a temperature in the range of 750 to 1200 Deg. C and at a reduced pressure in the range of 120 to 160 mbar; and wherein the quantity of nitrogen-containing gas in the reaction gases is in the range of 0.0001 to 0.02 vol% and further including diborane in the reaction gases; and wherein the nitrogen-containing gas may be selected from anyone or more of the group comprising nitrogen in hydrogen, nitrogen in oxygen, nitrogen in helium, nitrogen in nitrous oxide or nitrogen with diborane; and wherein the chemical vapour deposition occurs in the presence of microwave plasma generated by a magnetron operating at 6000 Watt and at 2.45 GHz and with hydrogen in the reactions gases.
机译:公开了一种通过化学气相沉积形成单晶宝石级钻石的方法,其中该方法包括以下步骤:(a)提供至少一个金刚石种子;(b)将种子暴露于通过化学气相沉积来生长钻石的条件下包括提供反应气体,该反应气体包括用于生长金刚石的含碳气体并且包括含氮气体; (c)控制反应气体中相对于其他气体的含氮气体的量,以使金刚石通过无缺陷和石墨夹杂物的逐步生长而生长;其中化学气相沉积包括将晶种保持在一定温度下。 750至1200度的范围。 C,并在120至160 mbar的减压下;所述反应气体中的含氮气体的量为0.0001〜0.02体积%,并且所述反应气体中还包含乙硼烷。其中含氮气体选自氢中的氮,氧中的氮,氦中的氮,一氧化二氮中的氮或乙硼烷中的任何一种或多种;并且其中化学气相沉积在存在由在6000瓦特和2.45GHz下操作的磁控管产生的微波等离子体的存在下并且在反应气体中具有氢气的情况下发生。

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